光學式檢測儀器

非破壞檢測解決方案

Optical Inspection & Measurement instruments


多功能靜、動態3D顯微量測儀SP-MWI

本產品結合多種顯微光學量測技術,適合應用於半導體、微機電/微結構和生化分析檢測;靜態量測可取得物體表面之2D、3D形貌尺寸,動態量測可量測物體的共振頻率、面內/面外振動模態分析;結合FTIR技術進一步取得全視野內的高光譜資料,透過高光譜資料可對待測物進行顏色、材質、成份等分析。

 

 

 


便攜式應力檢查儀

本產品可檢測待測物內部的全場應力分佈,便攜式的量測結構設計,使應力的檢測不再限於實驗室內,可直接至現場量測。1000mm的超大檢測視野,更可直接對於已組裝的產品進行量測,可以得到更直觀的應力分佈結果。 


微型光譜量測儀/高光譜量測儀

本公司提供完整的光譜量測服務和工具。檢測範圍從UV~NIR有各種型式光譜儀可供選擇外,檢測方式更有單點量測、多點量測、面型掃描量測及瞬時高光譜量測。本公司亦可協助用戶開發光譜比對分析軟體和生化分析系統,在光譜量測上提供最完整及全面的服務。

    


SP-SWI/SP-DWI Optical Static/Dynamic surface Profiler 

Fast nano-scale 3D profiling measurement, resonant frequency detecting

Surface analysis:roughness, flatness, thickness, step-height

  • Fast static profiling

SP-DWI/SWI provides friendly user interface, non-contact, fast and nano-scale precision 3D profiling measurement. It is suitable for analyzing any material surface with at least 1% reflectivity. The roughness and the step height analysis can be implemented.

  • Dynamic measurement

With high frequency stroboscopy (>1MHz), SP-DWI can measure the dynamic characteristics of the MEMS, such as the vibration mode and the surface profile of the periodic vibrating motion.

 

 

Metal

 

Glass

    
              ◎Roughness measurement

 

ITO etching

 

film step height

              ◎Step height measurement

 

◎Resonant frequencies detecting 

 

 

◎Static profile analyzer

 

◎Dynamic profiles of the vibration mode

 

◎Frequency response